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Past Events |
Fall Program 2002
Focus on the
Semiconductor and Microelectronics Industries
The Particle Society of Minnesota will hold its fourth annual meeting on:
Wednesday, October 9, 2002
8:00 A.M. to 4:00 pm
Radisson Hotel South, Bloomington, MN
The program this year will feature talks on particle technology related to
the semiconductor and microelectronics industries. Specific topics include:
- Chemical/mechanical polishing and slurry processing
- Advanced particle characterization technology
- Ultrasonic cleaning
- Contamination free manufacturing
- Particle detection and metrology
In addition to the talks, the Fall 2002 program will feature a number of informational exhibits from companies offering particle related equipment and services for the semiconductor and microelectronic industries.
The schedule for this Workshop is shown below.
Fall
Program Agenda (Preliminary) 8:00
- 8:20am On-Site
Registration (Radisson Hotel South, Bloomington, MN, Tel. 952-835-7800) 8:30
- 8:45am Welcome
and Introduction to The Particle Society of Minnesota: Dr. Jim Marti, Aveka, Inc., President of the Particle
Society 8:45
- 9:30am Perturbation Detection Analysis: A Method for Comparing
Instruments that Measure CMP Slurry Health. (Dr. Kristi Nicholes, BOC EDWARDS, Chanhassen, MN) 9:30
- 10:15am The Application of Auger Electron Spectroscopy (AES) for
Compositional Defect Review using the PHI SMART-200 &
SMART-Tool (Dr. Juergen H. Scherer, Evans PHI, Eden Prairie, MN) 10:15
- 10:30am Break 10:30
- 11:15am Abrasive
Particles in Electronic and Semiconductor Manufacturing (Dr.Eric
Funkenbusch, 3M Super Microfinishing Systems, St. Paul, MN) 11:15am Lunch 12:00
- 12:45pm Special
Luncheon Speaker: Particle Characterization in the Food Industry (Dr. Stephen Campbell, Professor of Electrical
& Computer Engineering, University of MN) 12:45
- 1:30pm Open
time for viewing exhibitor booths 1:30
- 2:15pm The Impact of Statistics on Choosing and Using a Liquid
Particle Counter, and Mini-Environment Monitoring
(Particle Measuring Systems, Inc., Boulder, Colorado) 2:15
- 3:00pm Designer
Waveforms - Ultrasonics (William
Puskas, Blackstone-Ney Ultrasonics, Jamestown, NY) 3:00
- 3:45pm Recent Advances in Contamination Free Manufacturing (Fred Gerbig, Gerbig Engineering Co., St. Paul, MN )
3:45 - 4:00pm
Closing
Remarks: David Arney, 3M, Program Chair PSOM
Copyright 2006, Particle Society of Minnesota